多晶硅工艺中低聚氯硅烷催化裂解制单硅烷的研究
赵文龙, 籍煜雯, 彭文才, 张建树, 张金利, 王西玉, 郑盛涛, 万伟
Study on the catalytic cracking of oligochlorosilane to produce monosilanesin poly-Si process
ZHAO Wenlong, JI Yuwen, PENG Wencai, ZHANG Jianshu, ZHANG Jinli, WANG Xiyu, ZHENG Shengtao, WAN Wei
石河子大学学报
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2022, (3): 278
-283
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DOI: 10.13880/j.cnki.65-1174/n.2022.21.010
