Study on Preparation Technology of TEOS from Silicon Tetrachloride

ZHAO Yun, SHI Linxia, DAN Jianming, QI Yu, HONG Chenglin

PDF(552 KB)
PDF(552 KB)
Journal of Shihezi University ›› 2014, Vol. 32 ›› Issue (2) : 218-222.

Study on Preparation Technology of TEOS from Silicon Tetrachloride

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2014, 32(2): 218-222

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(552 KB)

Accesses

Citation

Detail
Sections
Recommended

/

〈 〉